Laser micromachining apparatus

Details Laser micromachining apparatus Laser micromachining apparatus

1976-12-15

1978-12-05

Truhe, J. V.

Electric heating

Metal heating

By arc

B23K 900

Patent

active

041287525

ABSTRACT:
Laser micromachining apparatus for producing a selectable machining pattern on a workpiece, for example a substrate of paper or rubber or for producing a silicon integrated circuit. A high power laser beam carrying a controllable sequence of light pulses passes through a variable attenuator unit and then through a beam expander unit before impinging on a mask containing an enlarged pattern of the mark to be machined. The pattern in the mask consists of a suitable arrangement of small apertures. After diffraction through these apertures and focalization by a converging optical element, the laser light passes through an optical imaging unit which images the mask onto the workpiece to produce said selectable machining pattern thereon.

REFERENCES:
patent: 3156810 (1964-11-01), Samuelson
patent: 3266393 (1966-08-01), Chitoyat
patent: 3588439 (1971-06-01), Heller et al.
patent: 3778585 (1973-12-01), Mallozzi et al.
IBM Disclosure Bulletin vol. 13 No. 10 Mar. 1971 Kawecki.

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