Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1993-02-25
1995-06-27
Niebling, John
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
204129, 423645, 437104, 437107, 437132, 437133, C25B 102
Patent
active
054276594
ABSTRACT:
Many devices, such as those based on III-V semiconductor materials, are produced utilizing gases such as arsine that require careful handling of compressed gas cylinders. This care has engendered a search for alternate approaches. It has been found that the use of electrochemically generated gases such as arsine yields an efficient, pure source of such gases without necessitating the storage of large gas quantifies. Thus, a device fabrication procedure including in situ electrochemical generation of gases such as arsine is particularly useful.
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Cadet Gardy
Mitchell James W.
Valdes Jorge L.
AT&T Corp.
Niebling John
Schneider Bruce S.
Wong Edna
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