Probe navigation method and device and defect inspection device

Details Probe navigation method and device and defect inspection device Probe navigation method and device and defect inspection device

2008-05-13

2008-05-13

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754120, C324S754120, C324S754120, C250S492200, C385S145000

Reexamination Certificate

active

07372283

ABSTRACT:
A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

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