Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-01-01
2008-01-01
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S511000
Reexamination Certificate
active
07315382
ABSTRACT:
A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.
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Chowdhury Tarifur
Detschel Marissa J
Fish & Richardson P.C.
Zygo Corporation
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