Mask for laser crystallization and crystallization method...

Details Mask for laser crystallization and crystallization method... Mask for laser crystallization and crystallization method...

2008-05-06

2008-05-06

Rosasco, S. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S022000

Reexamination Certificate

active

07368204

ABSTRACT:
A mask for laser crystallization includes a transmissive portion defining a crystallization pattern and an alignment pattern. The alignment pattern includes a first pattern group having a size corresponding to the crystallization pattern and a second pattern group having a plurality of radial bars surrounding the first pattern group. A shielding portion surrounds the transmissive portion.

REFERENCES:
patent: 7033434 (2006-04-01), Kim
patent: 96-16314 (1996-12-01), None
patent: 2002-0064138 (2002-08-01), None
patent: 2003-0034730 (2003-05-01), None

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