Method, device, computer-readable storage medium and...

Details Method, device, computer-readable storage medium and... Method, device, computer-readable storage medium and...

2008-03-25

2008-03-25

Schillinger, Laura M. (Department: 2813)

Semiconductor device manufacturing: process

With measuring or testing

C438S017000, C438S005000

Reexamination Certificate

active

07348187

ABSTRACT:
In the case of the method, an analysis is performed by using values of at least one process parameter of the manufacturing process of the physical object and, as a result of the analysis, when they satisfy a prescribed selection criterion, physical objects are marked in such a way that the associated physical objects can be taken as a random sample for the monitoring of the manufacturing process.

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