Projection exposure apparatus and method, catadioptric...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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C355S053000

Reexamination Certificate

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07319508

ABSTRACT:
A catadioptric optical system forms an image of a first surface onto a second surface. The system includes a first lens having a first optical axis, a combination of a concave mirror and a second lens, the combination having a second optical axis, a third lens having a third optical axis, a first reflection plane that is arranged in an optical path between the first lens and the combination, and a second reflection plane that is arranged in an optical path between the combination and the third lens. An intersection line of an extension plane of the first reflection plane and an extension plane of the second reflection plane is set up so that the first optical axis, the second optical axis and the third optical axis intersect at one point. In addition, at least one of the first lens and the third lens is movable.

REFERENCES:
patent: 3574459 (1971-04-01), Hartwig et al.
patent: 4678321 (1987-07-01), Inokuchi
patent: 4736225 (1988-04-01), Tanaka et al.
patent: 5140459 (1992-08-01), Sagan
patent: 5473410 (1995-12-01), Nishi
patent: 5557469 (1996-09-01), Markle et al.
patent: 5559629 (1996-09-01), Sheets et al.
patent: 5576895 (1996-11-01), Ikeda
patent: 5636066 (1997-06-01), Takahashi
patent: 5638223 (1997-06-01), Ikeda
patent: 5689377 (1997-11-01), Takahashi
patent: 5694241 (1997-12-01), Ishiyama et al.
patent: 5739964 (1998-04-01), Allen
patent: 5805334 (1998-09-01), Takahashi
patent: 5835284 (1998-11-01), Takahashi et al.
patent: 5850300 (1998-12-01), Kathman et al.
patent: 5852518 (1998-12-01), Hatasawa et al.
patent: 5861997 (1999-01-01), Takahashi
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6157497 (2000-12-01), Kumazawa
patent: 6246204 (2001-06-01), Ebihara et al.
patent: 6249382 (2001-06-01), Komatsuda
patent: 6262796 (2001-07-01), Loopstra et al.
patent: 6327022 (2001-12-01), Nishi
patent: 6337162 (2002-01-01), Irie
patent: 6341007 (2002-01-01), Nishi et al.
patent: 6381077 (2002-04-01), Jeong et al.
patent: 6466303 (2002-10-01), Omura et al.
patent: 6512631 (2003-01-01), Shafer et al.
patent: 6677088 (2004-01-01), Magome et al.
patent: 6717746 (2004-04-01), Epple et al.
patent: 6909492 (2005-06-01), Omura
patent: 2002/0145711 (2002-10-01), Magome et al.
patent: 2002/0196533 (2002-12-01), Shafer et al.
patent: 2003/0020888 (2003-01-01), Tanaka et al.
patent: 2004/0104359 (2004-06-01), Komatsuda et al.
patent: 0 855 623 (1998-07-01), None
patent: 0 951 054 (1999-10-01), None
patent: 1 020 897 (2000-07-01), None
patent: 1 030 351 (2000-08-01), None
patent: 1 043 625 (2000-10-01), None
patent: 1 069 600 (2001-01-01), None
patent: 2 290 658 (1996-01-01), None
patent: A 4-196513 (1992-07-01), None
patent: A-6-250074 (1994-09-01), None
patent: A-6-265789 (1994-09-01), None
patent: A 6-300955 (1994-10-01), None
patent: A 6-349699 (1994-12-01), None
patent: A 7-86152 (1995-03-01), None
patent: A-7-168116 (1995-07-01), None
patent: A 8-62502 (1996-03-01), None
patent: A 8-63231 (1996-03-01), None
patent: A 8-327895 (1996-12-01), None
patent: A-9-312254 (1997-12-01), None
patent: A 10-163097 (1998-06-01), None
patent: A 10-163098 (1998-06-01), None
patent: A 10-163099 (1998-06-01), None
patent: A 10-163100 (1998-06-01), None
patent: A 10-209039 (1998-08-01), None
patent: A 10-214783 (1998-08-01), None
patent: A-11-84199 (1999-03-01), None
patent: A-11-194479 (1999-07-01), None
patent: A 11-219902 (1999-08-01), None
patent: A-11-231192 (1999-08-01), None
patent: A 11-251217 (1999-09-01), None
patent: A-2000-12453 (2000-01-01), None
patent: A 2000-21765 (2000-01-01), None
patent: A-2000-28898 (2000-01-01), None
patent: A-2000-29202 (2000-01-01), None
patent: A-2000-47114 (2000-02-01), None
patent: WO 98/28665 (1998-07-01), None
patent: WO 98/40791 (1998-09-01), None
patent: WO 99/10917 (1999-03-01), None
patent: WO 99/25010 (1999-05-01), None
patent: WO 99/34255 (1999-07-01), None
patent: WO 99/49505 (1999-09-01), None
patent: WO 99/50712 (1999-10-01), None
patent: WO 99/66370 (1999-12-01), None
U.S. Appl. No. 09/260,544, filed Mar. 2, 1999, Ebiarra et al.
U.S. Appl. No. 09/340,236, filed Jul. 1, 1999, Komatsuda.
U.S. Appl. No. 09/661,396, filed Mar. 26, 1999, Irie.

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