Thermal flow sensor

Measuring and testing – Volume or rate of flow – Thermal type

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G01F 168

Patent

active

053884574

ABSTRACT:
A thermal flow sensor according to the present invention is provided with a flow velocity probe equipped with a support member formed with an insulating wire material and a heat-sensitive resistor attached on a surface of the support member, in which the heat-sensitive resistor is formed as a film and made of a material whose resistance varies with temperature.

REFERENCES:
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patent: 3592055 (1971-07-01), Dorman
patent: 3900819 (1975-08-01), Djorup
patent: 3938384 (1976-02-01), Blair
patent: 4345465 (1982-08-01), Gruner et al.
patent: 4498337 (1985-02-01), Gruner
patent: 4554829 (1985-11-01), Sumal
patent: 4594889 (1986-06-01), McCarthy
patent: 4881407 (1989-11-01), Tashahashi
patent: 5060511 (1991-10-01), Sakaue
patent: 5094105 (1992-03-01), Emmert, Jr. et al.

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