Projection lens for mask pattern printing

Details Projection lens for mask pattern printing Projection lens for mask pattern printing

1976-04-20

1978-12-05

Sacher, Paul A.

350214, 350216, G02B 964, G02B 1324

Patent

active

RE0298565

ABSTRACT:
A projection lens for mask pattern printing comprising a photographic lens arrangement which is used for both the alignment and the printing. The arrangement includes a plurality of fixedly positioned lenses and two interchangeable lens elements which are interchangeably insertable into the arrangement. One interchangeable lens element is designed for the alignment, and is inserted into the arrangement during aligning, and the other interchangeable lens element is designed for the printing, and is inserted into the arrangement during the printing.

REFERENCES:
patent: 3588228 (1971-06-01), Wikczynski et al.
patent: 3685884 (1972-08-01), Harada
patent: 3733115 (1973-05-01), Cox

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