Vacuum creating method and apparatus

Details Vacuum creating method and apparatus Vacuum creating method and apparatus

1993-09-03

1995-06-27

Bennet, Henry A.

Drying and gas or vapor contact with solids

Apparatus

Vacuum

34404, 34408, H01L 2100

Patent

active

054268656

ABSTRACT:
A vacuum creating method comprising preparing a chamber for forming a space which can be made so atmospheric and vacuous as to allow a substrate to be directly or indirectly carried in and out of the space, exhausting the chamber, filling the space in the chamber with a CO.sub.2 gas whose vapor pressure becomes larger than 1 atm at ambient temperature but smaller than 10 Torr at a temperature lower than the ambient temperature, carrying the substrate into the chamber, cooling the CO.sub.2 gas to solidify, thereby making an internal pressure in the chamber highly vacuous, carrying the substrate out of the chamber, and heating the solidified dry ice to vaporize thereby returning the internal pressure in the chamber to atmospheric pressure.

REFERENCES:
patent: 2380339 (1945-07-01), Siedentopf
patent: 3255534 (1966-06-01), Kan
patent: 3487554 (1970-01-01), Tooby
patent: 5222307 (1993-06-01), Oba et al.
patent: 5237756 (1993-08-01), Hurwitt
patent: 5240556 (1993-08-01), Ishikawa et al.
patent: 5314541 (1994-05-01), Saito et al.

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