Method for producing a micromachined layered device

Details Method for producing a micromachined layered device Method for producing a micromachined layered device

2008-01-29

2008-01-29

Kim, Paul D. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S417000, C029S592100, C029S611000, C029S842000, C257S678000, C361S803000, C439S065000, C439S329000, C977S724000

Reexamination Certificate

active

07322100

ABSTRACT:
Methods for producing micromachined layered devices having a membrane layer and a first and second layer on both sides of the membrane layer are disclosed. The method includes applying a membrane layer to a substrate, opening a window in the substrate so as to enable the addition of layers from both sides of the membrane layer while the substrate is made into a frame that supports the membrane layer during processing, adding at least one layer on each side of the membrane either simultaneously or on one side at a time, and removing the device from the substrate frame.

REFERENCES:
patent: 5910943 (1999-06-01), Wickman
patent: 6103399 (2000-08-01), Smela et al.
patent: 6212252 (2001-04-01), Kise et al.
patent: 11-121900 (1999-04-01), None
patent: WO-01/80286 (2001-10-01), None
Kovas et al., “Silicon Micromachining: Sensors to Systems”, Analytical Chemistry, vol. 68, pp. 407A-412A, Jul. 1, 1996.
Smela, “Microfabrication of PPy microactuators and other conjugated polymer devices”, J. Micromech. Microeng., vol. 9, No. 1, pp. 1-18, 1999, IOP Publishing Ltd.

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