Method of fabricating magnetic sensors with pinned layers...

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S603110, C029S603130, C324S252000, C360S324110, C360S324120, C427S127000, C427S128000

Reexamination Certificate

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07367109

ABSTRACT:
A method for achieving a nearly zero net magnetic moment of pinned layers in GMR sensors, such as Co—Fe/Ru/Co—Fe, is described. The method determines a thickness of the first pinned layer which will yield the desired net magnetic moment for the pinned layers. A series of test structures are deposited on a substrate such as glass. The test structures include the seed layers, pinning layers and pinned layers and have varying thicknesses of the first pinned layer. The compositions of the materials and the thicknesses of all of the other films remain constant. The net areal magnetic moment of each test structure is measured and plotted versus the thickness of the first pinned layer. The thickness of the first pinned layer which corresponds most closely to zero net areal magnetic moment is chosen as the design point for the sensor.

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