Counting process and device for planar substrates

Details Counting process and device for planar substrates Counting process and device for planar substrates

2008-03-25

2008-03-25

Lee, Michael G. (Department: 2876)

Registers

Coded record sensors

C235S379000

Reexamination Certificate

active

07347369

ABSTRACT:
A process includes the steps of loosening a pack of piled substrates, taking a first image of the piled planar substrates, the image being made of a two-dimensional array of single image detectors arranged in lines and columns, counting the number of edges of substrates detected, statistically treating the result obtained and, based on the statistical treatment, determining whether the counting is accurate.

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