Siloxane resin-based anti-reflective coating composition...

Details Siloxane resin-based anti-reflective coating composition... Siloxane resin-based anti-reflective coating composition...

2008-05-06

2008-05-06

Moore, Margaret G. (Department: 1796)

Stock material or miscellaneous articles

Composite

Of silicon containing

C427S387000, C528S031000, C528S029000, C528S043000

Reexamination Certificate

active

07368173

ABSTRACT:
Herein we disclose a composition, comprising a siloxane resin having the formula (HSiO3/2)a. (SiO4/2)b(HSiX3/2)c(SiX4/2)d, wherein each X is independently —O—, —OH, or —O—(CH2)m—Zn, wherein each m is independently an integer from 1 to about 5, Z is an 5 aromatic moiety, and each n is independently an integer from 1 to about 6; 0<a<1, 0<b<1, 0<c<1, 0<d<1, and a+b+c+d=1. We also disclose methods for preparing the siloxane resin composition and a method of preparing an anti-reflective coating on a substrate, wherein the anti-reflective coating is derived from the siloxane resin composition.

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