Method and system for calibrating a micro-electromechanical...

Details Method and system for calibrating a micro-electromechanical... Method and system for calibrating a micro-electromechanical...

2008-05-27

2008-05-27

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S126000, C324S11700H

Reexamination Certificate

active

07378837

ABSTRACT:
A system and method for controlling a tunneling current between a first element and a second element of a micro-electro-mechanical system (MEMS) sensor. The system includes a tunneling current excitation source for providing a tunneling current between the elements and a tunneling current monitor for monitoring a change in the tunneling current responsive to movement of at least one element. The system also includes a positioner for positioning at least one of the elements and a controller in communication with the tunneling current monitor for controlling the positioner to position at least one of the elements at a first spacing between the elements for configuring the system in a referencing mode; and to position the elements at a second spacing for configuring the system in a sensing mode, whereby the system is calibrated with respect to the referencing mode.

REFERENCES:
patent: 6215318 (2001-04-01), Schoefthaler et al.
patent: 6348788 (2002-02-01), Yao et al.
patent: 6664786 (2003-12-01), Kretschmann et al.
patent: 6734660 (2004-05-01), Berkcan et al.
patent: 7112951 (2006-09-01), Berkcan et al.
patent: 2002/0021122 (2002-02-01), Yao et al.
patent: 2004/0158439 (2004-08-01), Kim et al.
patent: 2005/0270013 (2005-12-01), Berkcan et al.
patent: 2005/0270014 (2005-12-01), Zribi et al.
patent: 2006/0076947 (2006-04-01), Berkcan et al.

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