Position measuring system with a scanning unit having a...

Details Position measuring system with a scanning unit having a... Position measuring system with a scanning unit having a...

2008-03-25

2008-03-25

Lee, Patrick J. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S231140, C250S231180, C033S0010PT, C341S013000

Reexamination Certificate

active

07348546

ABSTRACT:
A position measuring system having a scale that includes an incremental graduation track, which extends in a measuring direction, the incremental graduation track having a periodic arrangement of graduation areas with different optical properties and a reference marking in a reference position, which has an aperiodic arrangement of graduation areas. A scanning unit including a light source and an opto-electronic detector arrangement having a reference pulse signal detection unit for generating a reference pulse signal. A periodic strip pattern results in a detection plane, which is amplitude-modulated in an area of the reference position, wherein the reference pulse signal detection unit includes several reference pulse signal detection elements, which create the reference pulse signal so that a periodic signal portion, as well as low-frequency signal portions are filtered out of the incremental graduation track to a large degree.

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R.M. Pettigrew, “Analysis of Grating Imaging and its Application to Displacement Metrology,” SPIE vol. 136 1stEuropean Congress on Optics Applied to Metrology (1977), pp. 325-332.

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