Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-05-20
2008-05-20
Rutledge, Della J. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S071000, C378S034000
Reexamination Certificate
active
07375794
ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes the following components: an illumination system configured to condition a radiation beam, a support constructed to support a patterning device, a substrate support constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. The patterning device is capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam. At least one of the components that experiences a heat load in use is provided with an integrally mounted heating element arranged to maintain the component at a substantially constant temperature.
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ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge Della J.
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