Substrate processing apparatus and transfer positioning...

Details Substrate processing apparatus and transfer positioning... Substrate processing apparatus and transfer positioning...

2008-04-22

2008-04-22

Epps, Georgia (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559330, C438S014000

Reexamination Certificate

active

07361920

ABSTRACT:
A substrate processing apparatus has a transfer mechanism arranged on a transfer base and configured to transfer a processing substrate between predetermined transfer positions, a mapping sensor arranged on the transfer base and configured to detect an arrangement state of a processing substrate inside a processing substrate accommodating case which accommodates a plurality of processing substrate in a shelf-like form, and a Z-axis teaching jig provided on or in the vicinity of one of the transfer positions. This substrate processing apparatus detects, by the mapping sensor, a height of the Z-axis teaching jig so as to perform teaching of Z-axis to the transfer mechanism with respect to the one of the transfer positions.

REFERENCES:
patent: 6144926 (2000-11-01), Ishizawa et al.
patent: 2005/0255609 (2005-11-01), Kumagai et al.
patent: 2004-174669 (2004-06-01), None
patent: 2004-214462 (2004-07-01), None
patent: 2003-0087225 (2003-11-01), None
patent: WO 2004/048048 (2004-06-01), None

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