Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-05-06
2008-05-06
Perkey, W. B. (Department: 2862)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S030000, C355S053000, C359S819000, C359S820000, C430S005000
Reexamination Certificate
active
07369215
ABSTRACT:
A laser crystallization apparatus has a light source, a phase shifter which modulates a laser light from the light source, an illumination system which is provided between the light source and the phase shifter, homogenizes a light intensity of the laser light from the light source and illuminates the phase shifter with the homogenized light, a stage which supports a non-single-crystal semiconductor, an image formation optical system having a plurality of optical members which is provided between the semiconductor on the stage and the phase shifter and forms an image of the modulated laser beam at a desired part on the semiconductor, and a temperature adjustment portion which adjusts a temperature of the optical member by heating or cooling the optical members of the image formation optical system.
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Advanced LCD Technologies Development Center Co. Ltd.
Fenwick Warren K
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Perkey W. B.
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