Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2008-04-22
2008-04-22
Larkin, Daniel S. (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
07360404
ABSTRACT:
A method for examining a surface of a sample is described using an atomic force scanning microscope (AFM) comprising a cantilever with a longitudinal extension along which a measuring tip is disposed, which is selectively arranged relative to the sample surface by a means for driving and whose spatial position is detected using a sensor unit. Vibration excitation is conducted at excitation amplitudes which produce inside the cantilever torsional amplitudes with maximum values which form a largely (substantively) constant plateau value despite increasing excitation amplitudes and the resonance spectra, in a range of maximum values of the torsional amplitudes, a widening of the resonance spectrum which is determinable by a plateau width. The resonance spectra, preferably the plateau value, the plateau width and/or the gradient of the respective resonance spectra are used for examining the sample.
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Arnold Walter
Rabe Ute
Reinstadtler Michael
Antonelli, Terry Stout & Kraus, LLP.
Fraunhofer-Gesellschaft zur Förderung der Angelwandten Fors
Larkin Daniel S.
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