Low walk-off interferometer

Details Low walk-off interferometer Low walk-off interferometer

2008-04-22

2008-04-22

Lyons, Michael A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07362447

ABSTRACT:
An interferometer can achieve a high dynamic range for measurements along vertical and horizontal directions using a first measurement channel providing a high dynamic range measurement of a path including components respectively parallel and perpendicular to the optics-object separation and a second measurement channel providing a high dynamic range measurement with just a perpendicular component. Further, using the same techniques at multiple locations around permits a high dynamic range for measurements of the degrees of freedom of an object.

REFERENCES:
patent: 3791739 (1974-02-01), Kawasaki
patent: 3815996 (1974-06-01), Colding et al.
patent: 4891526 (1990-01-01), Reeds
patent: 5151749 (1992-09-01), Tanimoto et al.
patent: 5717482 (1998-02-01), Akutsu et al.
patent: 6020407 (2000-02-01), Loopstra et al.
patent: 6208407 (2001-03-01), Loopstra
patent: 6650419 (2003-11-01), Hill
patent: 6674510 (2004-01-01), Jasper et al.

Affiliated with

Also associated with

Rating

Low walk-off interferometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Low walk-off interferometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Low walk-off interferometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2769883