Nano position sensing and surface estimation in scanning...

Details Nano position sensing and surface estimation in scanning... Nano position sensing and surface estimation in scanning...

2008-07-22

2008-07-22

Cygan, Michael (Department: 2855)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07401502

ABSTRACT:
A substitute reference signal input is incorporated into a state space controller for a scanning probe microscope to improve tracking efficiency.

REFERENCES:
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patent: 7066014 (2006-06-01), Salapaka et al.
patent: 7155964 (2007-01-01), Huang et al.
patent: 7289868 (2007-10-01), Picciotto et al.
patent: 7313948 (2008-01-01), Salapaka et al.
patent: 2006/0225490 (2006-10-01), Xi et al.

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