Sputtering target, sintered article, conductive film...

Stock material or miscellaneous articles – Composite – Of inorganic material

Reexamination Certificate

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Details

C428S699000, C428S701000, C428S702000, C204S298130, C204S192180, C204S192220, C204S192240

Reexamination Certificate

active

07393600

ABSTRACT:
A sintered article is fabricated which contains one or more of indium oxide, zinc oxide, and tin oxide as a component thereof and contains any one or more types of metal out of hafnium oxide, tantalum oxide, lanthanide oxide, and bismuth oxide. A backing plate is attached to this sintered article to constitute a sputtering target. This sputtering target is used to fabricate a conductive film on a predetermined substrate by sputtering. This conductive film achieves a large work function while maintaining as much transparency as heretofore. This conductive film can be used to achieve an EL device or the like of improved hole injection efficiency.

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U.S. Appl. No. 10/489,314, filed Mar. 18, 2004, Inoue et al.
U.S. Appl. No. 10/344,659.

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