System and method to inspect components having non-parallel...

Details System and method to inspect components having non-parallel... System and method to inspect components having non-parallel...

2008-05-06

2008-05-06

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S432000, C073S657000

Reexamination Certificate

active

07369250

ABSTRACT:
The present invention provides a method to detect and generate ultrasonic displacements at a remote target for ultrasonic inspection. This method involves generating an ultrasonic wave at a first location on an upper surface of the remote target. This ultrasonic wave is reflected from interior surfaces within the remote target wherein the reflected ultrasonic wave produces ultrasonic displacement at a second location on the upper surface of the remote target. A detection laser beam is generated and directed to the second location on the upper surface of the remote target. Here, the detection laser beam is scattered by the ultrasonic displacements to produce phase-modulated light. This phase-modulated light is collected and processed to obtain data representative of the ultrasonic surface displacements. Further, these ultrasonic displacements, when processed, will yield inspection information associated with the interior of the remote target.

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