Semiconductor optical modulation device

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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359256, 359229, 257 17, G02F 1025, H01L 31107

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active

058018727

ABSTRACT:
The invention provides a semiconductor optical modulation device which has low power dissipation, high extinction ratio and high speed response features. An n-type InP clad layer, an n.sup.- -type InAlAs-InAlGaAs composition inclination multiple layer, a p-type InP clad layer and a p.sup.+ -type InGaAs contact layer are layered on an n-type InP substrate. The layers are etched up to an intermediate location of the n-type clad layer to form a rib waveguide, and a positive electrode is formed on an upper portion of the rib waveguide. Further, a negative electrode is formed on the substrate.

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