Sensor with cantilever and optical resonator

Details Sensor with cantilever and optical resonator Sensor with cantilever and optical resonator

2008-01-15

2008-01-15

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07319527

ABSTRACT:
An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever (3) using an optical resonator between the cantilever (3) and an output surface (12b) of a lens assembly (10). In order to form the resonator, output surface (12b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly (10) and cantilever (3) comparatively large.

REFERENCES:
patent: 5166516 (1992-11-01), Kajimura
patent: 5465611 (1995-11-01), Ruf et al.
patent: 5560244 (1996-10-01), Prater et al.
patent: 5565987 (1996-10-01), Jain et al.
patent: 6713743 (2004-03-01), Kim et al.
patent: 2002/0000511 (2002-01-01), Schaffer et al.
patent: 0 398 085 (1990-11-01), None
patent: 0557743 (1993-09-01), None
Rugar D.; Mamin H. J.; and Guethner P., Improved fiber-optic interferometer for atomic force microscopy, Applied Physics Letters, vol. 55, Issue 25, pp. 2588-2590 (Dec. 18, 1989).
Rugar, D.; Mamin, H. J.; Erlandsson, R.; Stern, J. E.; Terris, B. D., Force microscope using a fiber-optic displacement sensor, Review of Scientific Instruments, vol. 59, Issue 11, pp. 2337-2340 (Nov. 1988).

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