Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – At least one aryl ring which is part of a fused or bridged...
Reexamination Certificate
2008-07-22
2008-07-22
Zimmer, Marc S (Department: 1796)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
At least one aryl ring which is part of a fused or bridged...
C524S284000, C528S021000, C528S034000
Reexamination Certificate
active
07402621
ABSTRACT:
The invention provides a coating solution for forming a porous film having excellent mechanical strength and dielectric properties and for easily forming a film with a freely controlled film thickness in an ordinarily employed method in semiconductor process. More specifically, provided are a method for preparing a porous-film-forming composition comprising steps of preparing polysiloxane, silica or zeolite particles (Component A), imparting crosslinkability to Component A, and temporarily terminating the crosslinkability; and a porous-film-forming composition obtainable in this method. In addition, provided is a method of forming a porous film comprising steps of preparing a porous-film-forming composition by preparing Component A, imparting crosslinkability to Component A and adding a crosslinkability inhibitor to temporarily terminate the crosslinkability; applying the porous-film-forming composition onto a substrate to form a film, drying the film, crosslinking the particles along with removing the crosslinkability inhibitor by heating the dried film.
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Anaso Takeshi
Hamada Yoshitaka
Iwabuchi Motoaki
Nakagawa Hideo
Ogihara Tsutomu
Matsushita Electric Co., Ltd.
Myers Bigel & Sibley & Sajovec
Shin-Etsu Chemical Co. , Ltd.
Zimmer Marc S
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