Stage apparatus, exposure apparatus, and method for...

Details Stage apparatus, exposure apparatus, and method for... Stage apparatus, exposure apparatus, and method for...

2011-03-15

2011-03-15

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S075000, C310S012060

Reexamination Certificate

active

07907256

ABSTRACT:
At least one exemplary embodiment is directed to a stage apparatus which comprises a first stage that is movable with respect to a horizontal plane that is defined by a first axis and a second axis that intersect each other at right angles, and a second stage that is movable on the first stage at least in the axial direction and in a rotational direction around a third axis, where a regulating member for restricting a movable range of the second stage is provided at a location in which a movable unit of the second stage faces the first stage through a gap.

REFERENCES:
patent: 2001/0050341 (2001-12-01), Kwan et al.
patent: 2003/0007140 (2003-01-01), Korenaga
patent: 2005/0186064 (2005-08-01), Nishimura
patent: 2006-022960 (2003-01-01), None
patent: 2005-243810 (2005-09-01), None

Affiliated with

Also associated with

Rating

Stage apparatus, exposure apparatus, and method for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage apparatus, exposure apparatus, and method for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage apparatus, exposure apparatus, and method for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2754404