Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – At least one aryl ring which is part of a fused or bridged...
Reexamination Certificate
2008-07-22
2008-07-22
Mulcahy, Peter D. (Department: 1796)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
At least one aryl ring which is part of a fused or bridged...
C524S556000, C524S565000, C526S242000, C526S245000, C526S319000, C526S346000, C568S812000
Reexamination Certificate
active
07402626
ABSTRACT:
The present invention relates to a top coat composition, which is characterized in that it is applied to a photoresist top surface by using a polymer containing at least one structure represented by the formula [1], [2] or [3]. It is possible to produce a top coat composition solution by dissolving this top coat composition in an organic solvent. These top coat composition and top coat composition solution can be used in immersion lithography.
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Komoriya Haruhiko
Maeda Kazuhiko
Miyazawa Satoru
Ootani Michitaka
Sumida Shinichi
Central Glass Company Limited
Crowell & Moring LLP
Hu Henry
Mulcahy Peter D.
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