Micromirror devices and methods of making the same

Details Micromirror devices and methods of making the same Micromirror devices and methods of making the same

2008-04-22

2008-04-22

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100

Reexamination Certificate

active

07362494

ABSTRACT:
A method for making a micromirror device comprises is disclosed herein.

REFERENCES:
patent: 6849471 (2005-02-01), Patel et al.

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