Optical position measuring arrangement

Details Optical position measuring arrangement Optical position measuring arrangement

2011-01-18

2011-01-18

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S521000, C250S23700G

Reexamination Certificate

active

07872762

ABSTRACT:
An arrangement for generating phase-shifted incremental signals characterizing relative positions of two objects moving with respect to each other along a measuring direction. The measuring arrangement includes a light source emitting bundles of beams, a measurement grating, a plurality of optional gratings and a scanning unit. The scanning unit includes a grating in a scanning plane, wherein the grating includes a plurality of blocks arranged periodically along the measuring direction with a grating periodicity equaling a fringe pattern periodicity, and each block includes n grating sections arranged along the measuring direction, each of the n grating sections having a periodic grating structure, deflecting the bundles of beams propagated through each of the n grating sections in several different spatial directions. The scanning unit further includes a plurality of detector elements arranged downstream of the grating, wherein the detector elements are arranged in the spatial directions in the detector plane, and wherein the detector plane is located where the bundles of beams coming from the grating are spatially separated. The fringe pattern is formed in the scanning plane by the bundles of beams emitted by the light source interacting with the measurement grating and the optional gratings.

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