Data processing: measuring – calibrating – or testing – Testing system – Of circuit
Reexamination Certificate
2008-07-22
2008-07-22
Nghiem, Michael P (Department: 2863)
Data processing: measuring, calibrating, or testing
Testing system
Of circuit
C702S035000
Reexamination Certificate
active
07403865
ABSTRACT:
A method and system for fault indication on a substrate. A method of the present invention includes the following steps. It is determined whether data includes at least one suspicious bit. A pattern generator is controlled with the data. A beam of radiation is patterned using the pattern generator. Features are projected by the patterned beam of radiation onto a target portion of a substrate. One or more markers are projected by the patterned beam of radiation onto the substrate indicating the target portions that correspond with the at least one suspicious bit.
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European Search Report for Appl. No. 05257757.4 2222; dated Mar. 27, 2006; 3 pages.
ASML Netherlands B.V.
Nghiem Michael P
Sterne Kessler Goldstein & Fox PLLC
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