Active solid-state devices (e.g. – transistors – solid-state diode – Voltage variable capacitance device – With means to increase active junction area
Reexamination Certificate
2011-08-02
2011-08-02
Gurley, Lynne A (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Voltage variable capacitance device
With means to increase active junction area
C257S312000, C257S532000, C257S595000, C257SE29344
Reexamination Certificate
active
07989922
ABSTRACT:
An array of deep trenches is formed in a doped portion of the semiconductor substrate, which forms a lower electrode. A dielectric layer is formed on the sidewalls of the array of deep trenches. The array of deep trenches is filled with a doped semiconductor material to form an upper electrode comprising a top plate portion and a plurality of extension portions into the array of trenches. In a depletion mode, the bias condition across the dielectric layer depletes majority carriers within the top electrode, thus providing a low capacitance. In an accumulation mode, the bias condition attracts majority carriers toward the dielectric layer, providing a high capacitance. Thus, the trench metal-oxide-semiconductor (MOS) varactor provides a variable capacitance depending on the polarity of the bias.
REFERENCES:
patent: 3962713 (1976-06-01), Kendall et al.
patent: 4694561 (1987-09-01), Lebowitz et al.
patent: 6661069 (2003-12-01), Chinthakindi et al.
patent: 7129801 (2006-10-01), Wu
patent: 2003/0183866 (2003-10-01), Sanchez et al.
patent: 2006/0094184 (2006-05-01), Katsumata
patent: 2006/0273426 (2006-12-01), Iijima
patent: 2008/0157159 (2008-07-01), Hook et al.
Mann Randy W.
Park Jae-Eun
Wachnik Richard A.
Abate Esq. Joseph P.
Gurley Lynne A
International Business Machines - Corporation
Kearney Naima J
Scully , Scott, Murphy & Presser, P.C.
LandOfFree
Highly tunable metal-on-semiconductor trench varactor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Highly tunable metal-on-semiconductor trench varactor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Highly tunable metal-on-semiconductor trench varactor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2742415