Liquid purification or separation – Processes – Including controlling process in response to a sensed condition
Reexamination Certificate
2011-03-22
2011-03-22
Griffin, Walter D (Department: 1774)
Liquid purification or separation
Processes
Including controlling process in response to a sensed condition
C210S175000
Reexamination Certificate
active
07910007
ABSTRACT:
It is an object of the present invention, in performing cooling treatment of a waste liquid, to provide a mechanism which safely treats the waste liquid by cooling, without increasing cost and without providing large equipment. A treatment method of a waste liquid is proposed, in which a chemical liquid is supplied from a chemical liquid supply portion to a chemical liquid treatment portion; water is supplied from a water supply portion to a water treatment portion; a first waste liquid discharged from the chemical liquid treatment portion is made to flow into an inner pipe through a waste chemical portion, concurrently with making a second waste liquid discharged from the water treatment portion flow through a waste water portion into an outer pipe which is disposed outside the inner pipe; and the second waste liquid has a lower temperature than the first waste liquid.
REFERENCES:
patent: 5158689 (1992-10-01), Ishii et al.
patent: 6-132272 (1994-05-01), None
patent: 7-078799 (1995-03-01), None
patent: 2000-088148 (2000-03-01), None
patent: 2003-229356 (2003-08-01), None
Allen Cameron J
Griffin Walter D
Husch & Blackwell LLP
Semiconductor Energy Laboratory Co,. Ltd.
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