Suspended nanowire sensor and method for fabricating the same

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation

Reexamination Certificate

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Details

C257SE51012, C438S049000, C438S057000, C977S720000, C977S762000, C977S890000

Reexamination Certificate

active

07872324

ABSTRACT:
Provided is a suspended nanowire sensor having good sensing characteristics and suitable for mass production, a method for fabricating the suspended nanowire sensor. The suspended nanowire sensor includes: first and second sensor electrodes formed on upper portions of a substrate and physically separated from each other; and a nanowire sensor material piece extending from the first sensor electrode to the second sensor electrode and physically suspended between the first and second sensor electrodes.

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Kong el al., Nanotube Molecular Wires as Chemical Sensors, Science 287, 622, 2000, pp. 622-625.

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