Method of forming thermal bend actuator with connector posts...

Details Method of forming thermal bend actuator with connector posts... Method of forming thermal bend actuator with connector posts...

2011-07-19

2011-07-19

Rojas, Omar (Department: 2874)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S044000, C216S027000, C438S021000

Reexamination Certificate

active

07980666

ABSTRACT:
A method of forming a thermal bend actuator in an inkjet nozzle assembly. The method includes: depositing sidewalls and a roof layer to define a nozzle chamber; defining first and second vias in one sidewall to reveal first and second electrodes; filling the vias with a conductive material using electroless plating to provide first and second connector posts; depositing an active beam material onto the roof layer; etching the active beam material to define a planar active beam member comprising a bent or serpentine beam element; and etching the roof layer to define the thermal bend actuator.

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