Methods of forming pluralities of capacitors

Details Methods of forming pluralities of capacitors Methods of forming pluralities of capacitors

2011-04-05

2011-04-05

Fulk, Steven J (Department: 2891)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S254000, C257S309000, C257SE21648

Reexamination Certificate

active

07919386

ABSTRACT:
The invention includes methods of forming pluralities of capacitors. In one implementation, a method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes within a capacitor array area over a substrate. The capacitor electrodes comprise outer lateral sidewalls. The plurality of capacitor electrodes is supported at least in part with a retaining structure which engages the outer lateral sidewalls. The retaining structure is formed at least in part by etching a layer of material which is not masked anywhere within the capacitor array area to form said retaining structure. The plurality of capacitor electrodes is incorporated into a plurality of capacitors. Other aspects and implementations are contemplated.

REFERENCES:
patent: 4517729 (1985-05-01), Batra
patent: 5236860 (1993-08-01), Fazan et al.
patent: 5340763 (1994-08-01), Dennison
patent: 5401681 (1995-03-01), Dennison
patent: 5467305 (1995-11-01), Bertin et al.
patent: 5498562 (1996-03-01), Dennison et al.
patent: 5532089 (1996-07-01), Adair et al.
patent: 5604696 (1997-02-01), Takaishi
patent: 5605857 (1997-02-01), Jost et al.
patent: 5652164 (1997-07-01), Dennison et al.
patent: 5654222 (1997-08-01), Sandhu et al.
patent: 5686747 (1997-11-01), Jost et al.
patent: 5702990 (1997-12-01), Jost et al.
patent: 5705838 (1998-01-01), Jost et al.
patent: 5767561 (1998-06-01), Frei et al.
patent: 5784112 (1998-07-01), Ogasawara et al.
patent: 5821140 (1998-10-01), Jost et al.
patent: 5869382 (1999-02-01), Kubota
patent: 5900660 (1999-05-01), Jost et al.
patent: 5955758 (1999-09-01), Sandhu et al.
patent: 5981350 (1999-11-01), Geusic et al.
patent: 5981992 (1999-11-01), Calpine Kenney
patent: 5990021 (1999-11-01), Prall et al.
patent: 6037212 (2000-03-01), Chao
patent: 6037218 (2000-03-01), Dennison et al.
patent: 6059553 (2000-05-01), Jin et al.
patent: 6090700 (2000-07-01), Tseng
patent: 6108191 (2000-08-01), Bruchhaus et al.
patent: 6110774 (2000-08-01), Jost et al.
patent: 6133620 (2000-10-01), Uochi
patent: 6159818 (2000-12-01), Durcan et al.
patent: 6180450 (2001-01-01), Dennison et al.
patent: 6204143 (2001-03-01), Roberts et al.
patent: 6204178 (2001-03-01), Marsh
patent: 6249019 (2001-06-01), Sandhu et al.
patent: 6258650 (2001-07-01), Sunouchi
patent: 6274497 (2001-08-01), Lou
patent: 6303518 (2001-10-01), Tian et al.
patent: 6303956 (2001-10-01), Sandhu et al.
patent: 6323528 (2001-11-01), Yamazaki et al.
patent: 6331461 (2001-12-01), Juengling
patent: 6372554 (2002-04-01), Kawakita et al.
patent: 6372574 (2002-04-01), Lane et al.
patent: 6383861 (2002-05-01), Gonzalez et al.
patent: 6399490 (2002-06-01), Jammy et al.
patent: 6403442 (2002-06-01), Reinberg
patent: 6432472 (2002-08-01), Farrell et al.
patent: 6458653 (2002-10-01), Jang
patent: 6458925 (2002-10-01), Fasano
patent: 6459138 (2002-10-01), Reinberg
patent: 6475855 (2002-11-01), Fishburn
patent: 6482749 (2002-11-01), Billington et al.
patent: 6617222 (2003-09-01), Coursey
patent: 6645869 (2003-11-01), Chu et al.
patent: 6656748 (2003-12-01), Hall et al.
patent: 6667502 (2003-12-01), Agarwal et al.
patent: 6673693 (2004-01-01), Kirchhoff
patent: 6707088 (2004-03-01), Fishburn
patent: 6709978 (2004-03-01), Geusic et al.
patent: 6720232 (2004-04-01), Tu et al.
patent: 6767789 (2004-07-01), Bronner et al.
patent: 6784112 (2004-08-01), Arita et al.
patent: 6784479 (2004-08-01), Park
patent: 6787833 (2004-09-01), Fishburn
patent: 6812513 (2004-11-01), Geusic et al.
patent: 6822261 (2004-11-01), Yamakazi et al.
patent: 6822280 (2004-11-01), Ito et al.
patent: 6844230 (2005-01-01), Reinberg
patent: 6849496 (2005-02-01), Jaiprakash et al.
patent: 6893914 (2005-05-01), Kim et al.
patent: 6897109 (2005-05-01), Jin et al.
patent: 6927122 (2005-08-01), Geusic et al.
patent: 6930640 (2005-08-01), Chung et al.
patent: 6962846 (2005-11-01), Fishburn et al.
patent: 6991980 (2006-01-01), Park
patent: 7005379 (2006-02-01), Sinha et al.
patent: 7042040 (2006-05-01), Horiguchi
patent: 7064028 (2006-06-01), Ito et al.
patent: 7064365 (2006-06-01), An et al.
patent: 7071055 (2006-07-01), Fishburn
patent: 7073969 (2006-07-01), Kamm
patent: 7074669 (2006-07-01), Iijima et al.
patent: 7081384 (2006-07-01), Birner et al.
patent: 7084451 (2006-08-01), Forbes et al.
patent: 7125781 (2006-10-01), Manning et al.
patent: 7153778 (2006-12-01), Busch et al.
patent: 7160788 (2007-01-01), Sandhu et al.
patent: 7179706 (2007-02-01), Patraw et al.
patent: 7199005 (2007-04-01), Sandhu et al.
patent: 7202127 (2007-04-01), Busch et al.
patent: 7226845 (2007-06-01), Manning et al.
patent: 7235441 (2007-06-01), Yasui et al.
patent: 7268034 (2007-09-01), Basceri et al.
patent: 7268039 (2007-09-01), Fishburn et al.
patent: 7273779 (2007-09-01), Fishburn et al.
patent: 7279379 (2007-10-01), Tran et al.
patent: 7282756 (2007-10-01), Agarwal et al.
patent: 7288806 (2007-10-01), Tran et al.
patent: 7320911 (2008-01-01), Basceri et al.
patent: 7321149 (2008-01-01), Busch et al.
patent: 7321150 (2008-01-01), Fishburn et al.
patent: 7335935 (2008-02-01), Sinha et al.
patent: 7341909 (2008-03-01), McDaniel et al.
patent: 7384847 (2008-06-01), Tran et al.
patent: 7387939 (2008-06-01), Manning
patent: 7393741 (2008-07-01), Sandhu et al.
patent: 7413952 (2008-08-01), Busch et al.
patent: 7440255 (2008-10-01), McClure et al.
patent: 7442600 (2008-10-01), Wang et al.
patent: 7445990 (2008-11-01), Busch et al.
patent: 7449391 (2008-11-01), Manning et al.
patent: 7517754 (2009-04-01), McDaniel et al.
patent: 7538036 (2009-05-01), Busch et al.
patent: 7638392 (2009-12-01), Wang et al.
patent: 2001/0012223 (2001-08-01), Kohyama
patent: 2001/0026974 (2001-10-01), Reinberg
patent: 2001/0044181 (2001-11-01), Nakamura
patent: 2002/0022339 (2002-02-01), Kirchhoff
patent: 2002/0030221 (2002-03-01), Sandhu et al.
patent: 2002/0039826 (2002-04-01), Reinberg
patent: 2002/0086479 (2002-07-01), Reinberg
patent: 2002/0090779 (2002-07-01), Jang
patent: 2002/0098654 (2002-07-01), Durcan et al.
patent: 2002/0153589 (2002-10-01), Oh
patent: 2002/0153614 (2002-10-01), Ema et al.
patent: 2002/0163026 (2002-11-01), Park
patent: 2003/0085420 (2003-05-01), Ito et al.
patent: 2003/0153146 (2003-08-01), Won et al.
patent: 2003/0178684 (2003-09-01), Nakamura
patent: 2003/0190782 (2003-10-01), Ko et al.
patent: 2003/0227044 (2003-12-01), Park
patent: 2004/0018679 (2004-01-01), Yu et al.
patent: 2004/0056295 (2004-03-01), Agarwal et al.
patent: 2004/0110340 (2004-06-01), Kim et al.
patent: 2004/0150070 (2004-08-01), Okada et al.
patent: 2004/0188738 (2004-09-01), Farnworth et al.
patent: 2005/0023588 (2005-02-01), Sandhu et al.
patent: 2005/0051822 (2005-03-01), Manning
patent: 2005/0054159 (2005-03-01), Manning et al.
patent: 2005/0104110 (2005-05-01), Yeo et al.
patent: 2005/0158949 (2005-07-01), Manning
patent: 2005/0176210 (2005-08-01), Kim et al.
patent: 2005/0287780 (2005-12-01), Manning et al.
patent: 2006/0014344 (2006-01-01), Manning
patent: 2006/0024958 (2006-02-01), Ali
patent: 2006/0046420 (2006-03-01), Manning
patent: 2006/0051918 (2006-03-01), Busch et al.
patent: 2006/0063344 (2006-03-01), Manning et al.
patent: 2006/0063345 (2006-03-01), Manning et al.
patent: 2006/0115951 (2006-06-01), Mosley
patent: 2006/0115952 (2006-06-01), Wu
patent: 2006/0121672 (2006-06-01), Basceri et al.
patent: 2006/0148190 (2006-07-01), Busch et al.
patent: 2006/0176210 (2006-08-01), Nakamura et al.
patent: 2006/0186451 (2006-08-01), Dusberg et al.
patent: 2006/0211211 (2006-09-01), Sandhu et al.
patent: 2006/0237762 (2006-10-01), Park
patent: 2006/0249798 (2006-11-01), Manning
patent: 2006/0261440 (2006-11-01), Manning
patent: 2006/0263968 (2006-11-01), Manning
patent: 2007/0032014 (2007-02-01), Sandhu et al.
patent: 2007/0048976 (2007-03-01), Raghu
patent: 2007/0093022 (2007-04-01), Basceri
patent: 2007/0099328 (2007-05-01), Chiang et al.
patent: 2007/0099423 (2007-05-01), Chen et al.
patent: 2007/0145009 (2007-06-01), Fucsko et al.
patent: 2007/0196978 (2007-08-01), Manning
patent: 2007/0207622 (2007-09-01), Rana et al.
patent: 2007/0238259 (2007-10-01), Bhat
patent: 2007/0257323 (2007-11-01), Tsui et al.
patent:

Affiliated with

Also associated with

Rating

Methods of forming pluralities of capacitors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods of forming pluralities of capacitors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods of forming pluralities of capacitors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2736512