Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-06-28
2011-06-28
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S077000
Reexamination Certificate
active
07969552
ABSTRACT:
A lithographic projection apparatus that is arranged to project a pattern from a patterning device onto a substrate using a projection system has a liquid supply system arranged to supply a liquid to a space between the projection system and the substrate. The apparatus also includes a liquid collecting system that includes a liquid collection member having a wick structure member through which a liquid is collected from a surface of an object opposite to the liquid collection member.
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paten
Hazelton Andrew J.
Novak W. Thomas
Watson Douglas C.
Glick Edward J
Nikon Corporation
Oliff & Berridg,e PLC
Whitesell-Gordon Steven H
LandOfFree
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