Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-08-23
2011-08-23
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
08004651
ABSTRACT:
A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system is provided with a first opening; a gap portion that is provided so that a liquid on an object that opposes the first opening can flow into the gap portion through the first opening; a liquid recovery part that suctions, through a porous member, at least part of the liquid that flows into the gap portion; and a second opening that is different from the first opening. The gap portion is open to the atmosphere through the second opening.
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Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
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