Tilt inspection apparatus and method of inspecting tilt

Details Tilt inspection apparatus and method of inspecting tilt Tilt inspection apparatus and method of inspecting tilt

2011-04-26

2011-04-26

Punnoose, Roy (Department: 2886)

Optics: measuring and testing

Angle measuring or angular axial alignment

Reexamination Certificate

active

07933006

ABSTRACT:
A tilt inspection apparatus which detects tilt of an object to be observed with respect to a placement surface on which the object is placed, including: a light source which irradiates light or projects an image onto the object to be observed; a light shield plate which has a first slit extended in a first direction and a second slit extended in a second direction normal to the first direction, and is disposed between the light source and the object to be observed; and a carriage mechanism which supports the light shield plate so as to be rotatable in the in-plane direction of the light shield plate, and fixes the light shield plate while aligning the first slit normal to the placement surface is provided.

REFERENCES:
patent: 5018853 (1991-05-01), Hechel et al.
patent: 3-128407 (1991-05-01), None
patent: 11-291008 (1999-10-01), None

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