Plasma display panel manufacturing method

Details Plasma display panel manufacturing method Plasma display panel manufacturing method

2011-06-07

2011-06-07

Duda, Kathleen (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Plural exposure steps

C430S320000

Reexamination Certificate

active

07955787

ABSTRACT:
The present invention provides a method of manufacturing a PDP that prevents defects due to dust adhering to a photomask, for example, from occurring in a structure of the PDP. In photolithography, exposure is performed twice in a same process, and photomask (22) is moved within an allowable range of displacement in an exposure pattern, between a first and a second exposures. Photomask (22) is exposed twice in total before and after moving photomask (22). Region (21a), an unexposed region due to interruption of dust (22b) attached to photomask (22), can be suppressed, enabling pattern exposure on photosensitive Ag paste film (21) to be favorably performed.

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