Pressure sensor including thermal selftest

Details Pressure sensor including thermal selftest Pressure sensor including thermal selftest

2011-04-05

2011-04-05

Thompson, Jewel (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07918135

ABSTRACT:
A semiconductor device includes a diaphragm, a sensing element, and a circuit. The sensing element is configured to sense deflection of the diaphragm. The circuit is configured to heat the diaphragm to induce deflection of the diaphragm.

REFERENCES:
patent: 4320664 (1982-03-01), Rehn et al.
patent: 5723784 (1998-03-01), Lembke et al.
patent: 6341528 (2002-01-01), Hoffman et al.
patent: 6427539 (2002-08-01), Chen et al.
patent: 7415885 (2008-08-01), Reinwald et al.
patent: 2008/0041164 (2008-02-01), Cottles et al.
patent: 2009/0211360 (2009-08-01), Rapps et al.
“A Comibed Piezoresistive/Capacitive Pressure Sensor with Self-Test Function Based on Thermal Actuation”, Dirk DeBruyker, et al., IEEE, 1997 (4 pgs.).

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