Thin film actuated mirror array in an optical projection system

Details Thin film actuated mirror array in an optical projection system Thin film actuated mirror array in an optical projection system

1997-01-31

1998-07-28

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359850, G02B 2600

Patent

active

057869286

ABSTRACT:
Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a reflecting member formed on the actuator. The actuator has a plurality of actuating portions in which adjacent actuating portions are actuated in opponent directions one after another, so the reflecting member installed on the actuator has large tilting angle. Therefore, the light efficiency of the light reflected by reflecting member increases and the contrast of the picture projected onto a screen also increases. Furthermore, the distance between a light source and the screen is wider because the tilting angle of the reflecting member is bigger.

REFERENCES:
patent: 5126836 (1992-06-01), Um
patent: 5469302 (1995-11-01), Lim
patent: 5604623 (1997-02-01), Ji et al.

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