Device for measuring or inspecting substrates of the...

Details Device for measuring or inspecting substrates of the... Device for measuring or inspecting substrates of the...

2011-03-15

2011-03-15

Hollington, Jermele M (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750220

Reexamination Certificate

active

07906978

ABSTRACT:
A device for measuring or inspecting substrates of the semiconductor industry, including a base frame and a module detachably mounted thereon via a module frame, wherein the module frame is detachably connected to the base frame via at least two self-aligning coupling elements and at least one alignment element, wherein the base frame and the module frame are in exactly defined spatial alignment with each other, when the module frame is detachably connected to the base frame.

REFERENCES:
patent: 5678944 (1997-10-01), Slocum et al.
patent: 6962471 (2005-11-01), Birkner et al.
patent: 2004/0258505 (2004-12-01), Wu
patent: 4235677 (1994-04-01), None
patent: 10053232 (2002-05-01), None
patent: 10323662 (2004-12-01), None
patent: 0899776 (1999-03-01), None
patent: WO 99/10915 (1999-03-01), None

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