Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-04-19
2011-04-19
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000
Reexamination Certificate
active
07929113
ABSTRACT:
A measurement apparatus which illuminates a pattern positioned on an object plane to form an aerial image40on an image plane and measures a light intensity distribution of the aerial image40via a slit54on the image plane, the measurement apparatus including a stage60moving the slit, a light receiving element53mounted on the stage60and including at least two light receiving portions which receive the light transmitted through the slit, a storage unit which stores a relationship between an angle ε and a distance between a center position of the slit54and a position where a intensity of light that the light receiving element53receives is maximum, a calculation unit which obtains the angle ε, and a stage driving unit80which rotates the stage60so that the angle ε is equal to zero.
REFERENCES:
patent: 5841520 (1998-11-01), Taniguchi
patent: 6771350 (2004-08-01), Nishinaga
patent: 7528966 (2009-05-01), Matsumoto
patent: 7791718 (2010-09-01), Hagiwara
W.N. Partlo, C.H. Fields, W.G. Oldham, Direct aerial image measurement as a method of testing high numerical aperture microlithographic lenses, J.Vac.Sci.Technol.B,vol. 11.
Canon Kabushiki Kaisha
Canon U.S.A. Inc. IP Division
Nguyen Hung Henry
LandOfFree
Measurement apparatus, measurement method, exposure... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Measurement apparatus, measurement method, exposure..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Measurement apparatus, measurement method, exposure... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2720851