Foreign matter inspection apparatus

Details Foreign matter inspection apparatus Foreign matter inspection apparatus

2011-03-01

2011-03-01

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237200

Reexamination Certificate

active

07898653

ABSTRACT:
Selection with alignment marks of an optimal template, its identification and similarity judgment are conducted by a calculation function of a correlation value provided to a foreign matter inspection apparatus. In other words, the foreign matter inspection apparatus includes unit for registering feature points of alignment marks formed on a surface of an inspected object, unit for collecting image data of the alignment marks formed on the surface of the inspected object and a data processor for extracting a feature point from the image data and calculating a correlation value of both feature points, and registers the image data of the alignment mark on the basis of a threshold value of the correlation value.

REFERENCES:
patent: 4586822 (1986-05-01), Tanimoto
patent: 5640243 (1997-06-01), Koitabashi et al.
patent: 6278957 (2001-08-01), Yasuda et al.
patent: 6850320 (2005-02-01), Shibata et al.
patent: 6883160 (2005-04-01), Tsuchiya et al.
patent: 6992766 (2006-01-01), Tanaka et al.
patent: 7170603 (2007-01-01), Katayama
patent: 7349575 (2008-03-01), Hattori et al.
patent: 5-47901 (1993-02-01), None
patent: 10-106941 (1998-04-01), None
patent: 11-220006 (1999-08-01), None
patent: 11-340115 (1999-12-01), None

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