Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1996-05-20
1998-07-28
Shafer, Ricky D.
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359263, 385 2, 385 9, 385 18, 385 49, G02F 1025, G02F 1035, G02F 1295, G02B 626
Patent
active
057869251
ABSTRACT:
A method for forming, and an arrangement for using arbitrary angle mirrors in substrates is disclosed. An erodible material, such as a photoresist, is applied to a substrate at a site and is exposed to radiation at that site which has a linear variation in energy at the surface of the erodible material. Due to this variation in exposure energy, a taper results in the erodible material after development. The tapered region is then etched in a manner which etches both the erodible layer and the underlying substrate. The taper in the erodible layer provides a varying attenuation during the etching process such that the taper of the erodible layer, or a multiple of it, is transferred to the substrate. In a first embodiment, a tapered reflective surface is formed in a substrate, which surface engages an optical signal and deflects it to an optical device or another surface. In a second embodiment, two tapered reflective surfaces are formed in a substrate and oriented to deflect incident light to a modulation device. In a third embodiment, an arrangement for modulating a light signal is formed by two tapered reflective surfaces. The surfaces are oriented to form a vee groove in a substrate and are coated with an active semiconductor device.
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Goossen Keith Wayne
Walker James Albert
Lucent Technologies - Inc.
Shafer Ricky D.
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