Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2011-07-19
2011-07-19
Zervigon, Rudy (Department: 1716)
Coating apparatus
Gas or vapor deposition
Multizone chamber
C156S345310, C156S345320
Reexamination Certificate
active
07981217
ABSTRACT:
Disclosed herein is a vertical heat treatment apparatus which includes a thermal reactor having a reactor opening, a cover that hermetically closes the reactor opening, a holder that holds a large number of to-be-processed substrates via a ring-shaped support plate in such a manner as to arrange the substrates vertically at predetermined intervals, and an elevator mechanism that loads the holder into and unloads the holder from the thermal reactor. A transfer mechanism has a plurality of transfer plates that are arranged at predetermined intervals to carry to-be-processed substrates, and transfers the to-be-processed substrates between the storage container and the holder. The support plate is divided into an outer support plate and an inner support plate. The outer support plate has a cutout section through which the transfer plates can vertically pass to transfer the to-be-processed substrates. The inner support plate is placed at the inner periphery of the outer support plate and provided with a block section for blocking up the cutout section. Therefore, a plurality of to-be-processed substrates can be transferred at a time to the holder having the ring-shaped support plate. This makes it possible to reduce the transfer time, increase the processing volume, and provide increased throughput.
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Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
Zervigon Rudy
LandOfFree
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