Anti-capture method and apparatus for micromachined devices

Details Anti-capture method and apparatus for micromachined devices Anti-capture method and apparatus for micromachined devices

2011-06-07

2011-06-07

Dole, Timothy J (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S676000, C073S514320, C361S277000

Reexamination Certificate

active

07956621

ABSTRACT:
A MEMS device has a movable beam, a differential capacitor with a movable electrode that moves in response to the displacement of the movable beam and that is disposed between two stationary electrodes, and a voltage circuit for applying a first voltage to the first stationary electrode, second voltage to the second stationary electrode, and a third voltage to the movable electrode. The MEMS device also has a monitor operably coupled with the movable beam to monitor the displacement of the movable beam. In some embodiments, the monitor may monitor the distance between the movable electrode and at least one of the stationary electrodes. The MEMS device further has a voltage reducing circuit operatively coupled with the monitor, the movable electrode, and the stationary electrodes. The voltage reducing circuit reduces the differential between the third voltage and the voltages on the stationary electrodes when the monitor detects that the displacement of the movable beam is greater than or equal to a threshold value.

REFERENCES:
patent: 4504803 (1985-03-01), Lee et al.
patent: 4504804 (1985-03-01), Chang et al.
patent: 5345824 (1994-09-01), Sherman et al.
patent: 5511420 (1996-04-01), Zhao et al.
patent: 5623432 (1997-04-01), Degrauwe
patent: 5659262 (1997-08-01), Memishian
patent: 5748004 (1998-05-01), Kelly et al.
patent: 5798748 (1998-08-01), Hilton et al.
patent: 6223598 (2001-05-01), Judy
patent: 6530275 (2003-03-01), Hollocher et al.
patent: 6718825 (2004-04-01), Platt et al.
patent: 6761069 (2004-07-01), Hollocher et al.
patent: 6809527 (2004-10-01), Ishio et al.
patent: 7340955 (2008-03-01), Manninen
patent: 7640803 (2010-01-01), Gutierrez et al.
patent: 2006/0112765 (2006-06-01), Malvern
patent: 2008/0000296 (2008-01-01), Johnson
patent: 2008/0218182 (2008-09-01), Gao et al.
Authorized Officer Philippe Foussier, International Search Report and the Written Opinion of the International Search Authority, or the Declaration; PCT/US2009/046119; Sep. 10, 2010 [2550/B80WO].
Authorized Officer Philippe Foussier, Written Opinion of the International Searching Authority; PCT/US2009/046119; Sep. 10, 2010 [2550/B80WO].

Affiliated with

Also associated with

Rating

Anti-capture method and apparatus for micromachined devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Anti-capture method and apparatus for micromachined devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Anti-capture method and apparatus for micromachined devices will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2716300