Deflectable structure, micromechanical structure comprising...

Details Deflectable structure, micromechanical structure comprising... Deflectable structure, micromechanical structure comprising...

2011-01-18

2011-01-18

Wojciechowicz, Edward (Department: 2895)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257S419000, C257S618000, C257S622000, C428S101000

Reexamination Certificate

active

07872319

ABSTRACT:
A deflectable structure includes a layer having a first area and a second area, a trench structure in the layer which penetrates the layer and separates the first area from the second area, a first junction between the first area and the second area, and a second junction between the first area and the second area, the first area being permanently moveable from a first, permanent position with regard to the second area to a second position, deflected as compared to the first position, with regard to the second area by applying a force.

REFERENCES:
patent: 6539798 (2003-04-01), Geiger et al.
patent: 6668628 (2003-12-01), Hantschel et al.
patent: 6819822 (2004-11-01), Behin et al.
patent: 6840642 (2005-01-01), Ishikawa et al.
patent: 7195946 (2007-03-01), D'Arrigo et al.
patent: 2002/0012490 (2002-01-01), Farmer, III et al.
patent: 2006/0154448 (2006-07-01), Stoll et al.
patent: 102 20 371 (2003-11-01), None
patent: 102 41 450 (2004-03-01), None
Official communication issued in counterpart German Application No. 10 2007 015 726.8, mailed on Mar. 2, 2009.
V.P. Jaecklin et al., “Optical Microshutters and Torsional Micromirrors for Light Modulator Arrays,” Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings, IEEE, Feb. 7-10, 1993, pp. 124-127.

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